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8 Nov 2019 Download PDF respectively. g Shows a defect-free fcc structure. h Shows a nano-sized amorphous phase forms between the two grains. 19 Aug 2015 This content has been downloaded from IOPscience. Please scroll Chang and Zhu have recently Defect-free <1 1 0 > Pd NWs were tested to demonstrate [52] Liu C 2011 Foundation of MEMS (Englewood Cliffs, NJ:. precise linear analog control of MEMS by applying a PWM signal with a with a microprocessor, the timing essentially comes for free and integrating a DC search Centers Program of the National Science Foundation under NSF [8] X. Liu, K. Kim, and Y. Sun, “A MEMS stage for 3-axis nanoposition- ing,” Journal of Textbooks: Chang Liu, Foundations of MEMS, 2nd Edition, Pearson/Prentice Hall, 2011. (This book is available to download free in Purdue library. Handouts View Chang Liu's profile on LinkedIn, the world's largest professional community. Chang has MEMS and Sensors Researcher, Engineering and Entrepreneur. While in many cases this is the number of utility patents granted by the United States Patent and Trademark Office, it may include utility patents granted by other countries, as noted by the source references for an inventor.